Final Letter Report on Phase 1 of Contract N00014-75-C-0003,

Abstract : This report summarizes the work done at Accelerators, Inc., toward achieving the goals on the 'Procurement Description, Ion Implantation System'. Special emphasis has been placed on certain requirements which are: (1) System must be small and lightweight; (2) must implant ultrapure 27Al(+) with complete freedom from 23Na(+) contamination; (3) able to operate for long periods unattended; (4) must achieve relatively high scanned beam currents at low energies.