Magnetron Sputtering Formation of Molybdenum-Copper Alloys for Fabrication of Millimeter-Band Planar Slow Wave Structures
2021
The goal of this work is an investigation of peculiarities of the molybdenum-copper alloys formation by magnetron sputtering to meet the requirements of low thermal expansion coefficient together with high electrical/thermal conductivity of the material for potential use in microfabrication of slow-wave structures for miniaturized millimeter-band vacuum electron devices. The study is focused on controlling the roughness and adhesion of the fabricated thin Cu-Mo alloy films. The roughness mainly determines the transmission losses at millimeter and THz frequencies, whereas the adhesion of the film is quite important for further processing, such as laser ablation.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
6
References
0
Citations
NaN
KQI