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Compatibility of thinning and low temperature process for ferroelectric Hf 0.5 Zr 0.5 O 2 films
Compatibility of thinning and low temperature process for ferroelectric Hf 0.5 Zr 0.5 O 2 films
2021
Kento Tahara
Kasidit Toprasertpong
Mitsuru Takenaka
Shinichi Takagi
Keywords:
Thinning
Ferroelectricity
compatibility
process
Materials science
Composite material
Correction
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