Optical parameters and energy gap estimation in hafnia thin film

Optical absorption spectra of HfO2 thin film synthesized by ion beam sputtering deposition technique were studied. Interference effects were used to determine film thickness, which was d=288 nm, and to calculate dispersion curves for refractive index, extinction coefficient and both real and imaginary parts of dielectric permittivity. Optical data near intrinsic absorption edge were analyzed to estimate the energy gap of Eg = 5.40±0.05 eV in the hafnia film under research.