Four-dimensional spectral low-loss energy-filtered transmission electron tomography of silicon nanowire-based capacitors

We show the potential of low-loss energy filtered transmission electron microscopy combined with tomography for four-dimensional structural characterization of nanowire-based capacitors. This method allows reconstructing local low-loss spectra within the whole device giving access to the chemical distribution. We used this capability to extract information about plasmon peaks from the different materials within the nanowire leading to the reconstruction of a three-dimensional model of the device. Additionally, the reconstructed low-loss spectra are compared to spectra acquired in classical two-dimensional scanning geometries across the whole nanowire and across a thin focused ion beam-prepared lamella of the nanowire.