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Predicting cycle time distributions with aggregate modelling of work areas in a real-world wafer fab
Predicting cycle time distributions with aggregate modelling of work areas in a real-world wafer fab
2021
Patrick C. Deenen
Jelle Adan
John W. Fowler
Keywords:
cycle time
Process engineering
Wafer fabrication
Computer science
Work (electrical)
Aggregate (composite)
Correction
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