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Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer
Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer
2003
Y. Ichida
Y. Morimoto
M. Murakami
Ryunosuke Sato
Keywords:
Atomic force microscopy
force transducer
Materials science
Optics
Correction
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