Fabrication of integrated spectrometer module based on optical waveguide platform with planar nano diffraction grating using UV imprint lithography

Abstract We proposed a simple and attractive integrated polymeric spectrometer module based on a planar optical waveguide platform that can be easily manufactured at a low cost. The proposed integrated spectrometer module comprises a planar optical waveguide with a concave mirror, a planar nano diffraction grating with a non-uniform pitch, an optical fiber, and a photodiode array. The nano diffraction grating and optical waveguide platform were precisely fabricated using the UV imprint lithography suitable for mass production. To provide uniform diffraction efficiency in the wavelength range of 400–650 nm, the nano diffraction grating had a quasi-three-dimensional V-shaped groove with a blazing angle of 22.5° and non-uniform pitches, maximum of 0.406 μm and minimum of 0.393 μm. In addition, the optical waveguide platform focuses the optical source to the nano diffraction grating using the concave mirror. The alignment guide pattern is used to align the nano diffraction grating and optical fiber. Through the packaging process of nano grating device, photo diode array and fiber on the planar optical waveguide platform, we manufactured the polymeric integrated polymeric spectrometer module. We confirmed that the fabricated planar spectrometer module had a resolution of 5 nm or less for spectral bandwidth of 250 nm, and it can be used widely in portable spectrometer sensors.