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Fabrication of w-AlNThin Films using Tilted Sputter Target and Unrotated Substrate Holder
Fabrication of w-AlNThin Films using Tilted Sputter Target and Unrotated Substrate Holder
2020
A. S. Bakri
Nafarizal Nayan
Mohd Khairul Ahmad
Soon Chin Fhong
Mohd Zainizan Sahdan
Ahmad Shuhaimi Abu Bakar
Wan Haliza Abdul Majid
Muliana Tahan
Nur Amaliyana Raship
Mohd Yazid Ahmad
Jln Kajang Perdana Nanorian Technologies Sdn Bhd
, Taman Kajang Perdana, Kajang, Selangor, Malaysia
Keywords:
Sputtering
Optoelectronics
Fabrication
Substrate (chemistry)
Materials science
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