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Effect of Al Doping on the Reliability of ALD HfO2
Effect of Al Doping on the Reliability of ALD HfO2
2014
M. N. Bhuyian
D. Misra
Kandabara N. Tapily
Robert D. Clark
Steve Consiglio
Cory Wajda
G. Nakamura
Gert Leusink
Keywords:
Doping
Electronic engineering
Artificial intelligence
Materials science
Engineering physics
Algorithm
Correction
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