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Densification of CVD-SiO2 Film Using Radical Oxidation
Densification of CVD-SiO2 Film Using Radical Oxidation
2010
Kazumasa Kawase
Akinobu Teramoto
Hiroshi Umeda
Tomoyuki Suwa
Yasushi Uehara
Takeo Hattori
Tadahiro Ohmi
Keywords:
Materials science
Photochemistry
radical oxidation
Correction
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