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Study on deposition rate and microstructure of niobium coating prepared by CVD from niobium pentafluoride
Study on deposition rate and microstructure of niobium coating prepared by CVD from niobium pentafluoride
2017
Mingmin Zheng
Keywords:
Microstructure
Coating
Pentafluoride
Materials science
Niobium
Inorganic chemistry
Metallurgy
deposition rate
Deposition (law)
Correction
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