Thermal conduction inhomogeneity of nanocrystalline diamond films by dual-side thermoreflectance

Thin diamond films of thickness near 1 μm can have highly nonuniform thermal conductivities owing to spatially varying disorder associated with nucleation and grain coalescence. Here, we examine the nonuniformity for nanocrystalline chemical vapor deposited diamond films of thickness 0.5, 1.0, and 5.6 μm using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The extracted local thermal conductivities vary from less than 100 W m−1 K−1 to more than 1300 W m−1 K−1 and suggest that the most defective material is confined to within 1 μm of the growth surface.