On the optical properties of SLS ELA polycrystalline silicon films

In this work we investigate optical properties of SLS-ELA poly-Si films. UV-visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical properties, however very different from a-Si and c-Si. The XRD spectra acquired exhibited a prevailing peak angle at around 21.5^o, which, according to literature, corresponds to a Si modification named allo-Si. The above indicate that possibly SLS-ELA Si films have a crystallographic structure similar to allo-Si.