Old Web
English
Sign In
Acemap
>
Paper
>
The Nanoindentation-Induced Cracking of Thin Silicon Chips
The Nanoindentation-Induced Cracking of Thin Silicon Chips
2010
Haibo Wan
Yao Shen
Wei Zeng
Qiulong Chen
Keywords:
Composite material
Materials science
Nanoindentation
Cracking
Silicon
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]