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Polarized Resonant Critical Dimension Small Angle X-Ray Scattering for the Characterization of Polymer Patterns
Polarized Resonant Critical Dimension Small Angle X-Ray Scattering for the Characterization of Polymer Patterns
2016
Christopher Liman
Daniel F. Sunday
Hyun Wook Ro
Lee J. Richter
Adam F. Hannon
R. Joseph Kline
Keywords:
Small-angle X-ray scattering
Polymer
Critical dimension
Optics
Physics
Materials science
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