Atomic layer deposition fabricated substoichiometric TiOx nanorods as fuel cell catalyst supports

Atomic layer deposition (ALD)-grown substoichiometric TiOx (1< x <2) was investigated as a possible fuel cell catalyst support material. The Magneli or Ti4O7 phase in particular exhibits acombination of high conductivity, stability, and corrosion resistance, which makes this material a promising replacement support structure when considering the inferior corrosion resistance of carbon-based supports. The current work investigates a novel technique for manufacturing conductive high aspect ratio TiOx nanorods using ALD over high aspect ratio anodic aluminum oxide templates and annealing to reduce the degree of oxidation and increase conductivity. The combination of optimized ALD parameters and the inclusion of a post deposition H2 anneal enable the production of a conductive Magneli phase TiOx film at temperatures below 450 °C.