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P-75: Advanced Halftone Photolithography Using Four-Mask Process Architecture for G8.6 TFT-LCDs
P-75: Advanced Halftone Photolithography Using Four-Mask Process Architecture for G8.6 TFT-LCDs
2018
An-Thung Cho
James Hsu
Jeff Zhou
Jinn Hong
Feng-yun Yang
Yan Mei Luo
Yi-qun Tian
Dan Lei
Zhen Liu
Qiong-hua Mo
Kai-jun Liu
Bang-tong Ge
Feng-xiang Long
Ting-ting Fu
Min Li
Wade Chen
York Lu
Keywords:
Thin-film transistor
Photolithography
Halftone
Process architecture
Electronic engineering
Materials science
Optoelectronics
Computer science
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