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Monte Carlo Simulation of Sculptured Thin Films Growth of SiO2 on Si for Applications
Monte Carlo Simulation of Sculptured Thin Films Growth of SiO2 on Si for Applications
2017
Stephen G. Vine
S. Fujiyama
M Tsubota
M. Nielsen
Gunner Chr. Larsen
Kurt Schaldemose Hansen
Keywords:
Thin film
Monte Carlo method
Analytical chemistry
Materials science
Optoelectronics
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