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A New Technological Process for Fabrication of InGaAsP/InP Heterostructure Laser using CBE/MOCVD Growth Techniques
A New Technological Process for Fabrication of InGaAsP/InP Heterostructure Laser using CBE/MOCVD Growth Techniques
1994
Bertone
Boschis
Fornuto
Gastaldi
Madella
Meliga
Staňo
Keywords:
Metalorganic vapour phase epitaxy
Heterojunction
Etching (microfabrication)
Laser
Fabrication
Materials science
Optoelectronics
process
Correction
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