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MEMS capacitive switch with stable actuation voltage over a broad temperature range
MEMS capacitive switch with stable actuation voltage over a broad temperature range
2012
Olszewski
Ryan
Houlihan
OMahony
Duane
Keywords:
Capacitance
Temperature measurement
capacitive switch
Voltage
Atmospheric temperature range
Microelectromechanical systems
Stress (mechanics)
Optoelectronics
Materials science
Electrode
Correction
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