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Pulsed Inductively Coupled Plasma Discharge Simulation for Semiconductor Processing in 2D Axisymmetric Structure
Pulsed Inductively Coupled Plasma Discharge Simulation for Semiconductor Processing in 2D Axisymmetric Structure
2020
Yejin Shon
Sora Lee
Dong-gil Kim
Deuk-Chul Kwon
HeeHwan Choe
Keywords:
Semiconductor
Rotational symmetry
Optoelectronics
Inductively coupled plasma
Materials science
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