Old Web
English
Sign In
Acemap
>
Paper
>
Near‐Surface Defect Control by Vacancy Injecting/Out‐Diffusing Rapid Thermal Annealing
Near‐Surface Defect Control by Vacancy Injecting/Out‐Diffusing Rapid Thermal Annealing
2019
T. Müller
Michael Gehmlich
Andreas Sattler
Gudrun Kissinger
Dawid Kot
Erich Daub
Alfred Miller
Keywords:
Condensed matter physics
Annealing (metallurgy)
Vacancy defect
Physics
rapid thermal annealing
defect engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
26
References
1
Citations
NaN
KQI
[]