Ultra-high quantum efficiency mushroom-type RCE photodetector

Ultra-high quantum efficiency mushroom-type RCE photodetector is reported, which combines the high-bandwidth of the mushroom-type detector and the high quantum efficiency of the RCE photodetector. The difference from other RCEs is that the top mirror of the detector is an oblique deflection mirror composed of non-periodic subwavelength gratings (SWG). From the simulation results, the peak quantum efficiency of the detector is 99.38%, the line width is 0.7 nm (full width at half maximum (FWHM)), and the 3 dB bandwidth is 31.1 GHz.