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CFD Study for the Design of Coolant Path in Cryogenic Etch Chuck
CFD Study for the Design of Coolant Path in Cryogenic Etch Chuck
2021
Soo-hyun Jo
Ji-Hee Han
Jong Oh Kim
Hwi Han
Sang Jeen Hong
Keywords:
Materials science
Path (graph theory)
Computational fluid dynamics
Heat transfer
Coolant
Mechanical engineering
Correction
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