Particle analysis by high‐resolution scanning Auger microscopy

Atmospheric corrosion of permalloy films produces defects of a few microns down to submicrometer size. Submicrometer elemental analyses of these films by scanning Auger microscopy are presented. Secondary‐electron images are used to locate the defects, after which selected‐point Auger spectra and Auger line scans are obtained. These data show the presence of submicrometer particles containing O, S, Cl, and Na at the defect sites. The impurities are related to the corrosive environment to which the permalloy films were exposed.