The effect of pretreatment by titanium ion beam on the internal stresses and microstructure of the TiAlN coating obtained by magnetron sputtering

The increase in duration of titanum ion pretreatment of the substrate-austenitic steel leads to a decrease in the transverse dimensions of the nanocrystalline columnar coating Ti1−xAlxN structure, emergence of ferritic layer between coating and substrate and an increase in the compressive macrostresses both in the coating and in the substrate.