The ion milling and lonenätzbearbeitungsverfahren

A sample (3) is tilted relative to the optical axis of an ion beam (2) (the Z axis) / pivoted to the tilting and returning type in the surface to be machined (3a) of the sample (3) between a surface state in which the to machined surface (3a) of the sample (3) in the tilt axis (Y-axis direction) are presented, and to repeat a tilted surface state in which the portion of the surface to be machined (3a) (on the side of a sample stage in the tilt axis Y -axis direction) protrudes more than the part of the surface to be machined (3a) on the side of a mask so that the surface to be machined (3a) is irradiated at a small angle with the ion beam 2, and (to a cavity 61) or formed of a different material (62) projections / recesses (63) are avoided. It is thus possible, resulting in the production of a sample cross section at one cavity (61) or of a different material (62) to avoid projections / recesses (63) and to obtain a suitable for a viewing / analysis sample cross-section.