A metallurgical investigation of the AuSb and AuAs systems

Abstract In order to understand the function of allowed contacts to GaAs containing antimony, we studied the interactions of the AuSb and AuAs systems on heat treatment using an inert substrate. Backscattering analysis revealed that gold and antimony form AuSb 2 and/or the eutectic mixture, depending on the relative amounts of gold and antimony and on the annealing temperature, whereas arsenic simply outdiffuses through gold without forming an alloy with it. For contacts on GaAs which contain antimony, the above interactions are desirable in order that GaSbAs may form at the interface.