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In-Volume Laser Direct Writing of Silicon—Challenges and Opportunities
In-Volume Laser Direct Writing of Silicon—Challenges and Opportunities
2021
Maxime Chambonneau
David Grojo
Onur Tokel
Fatih Omer Ilday
Stelios Tzortzakis
Stefan Nolte
Keywords:
Optoelectronics
Materials science
laser direct writing
Volume (thermodynamics)
Infrared
Silicon
Correction
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