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Friction Mechanism and Characteristics of Reticle Based on Contact Theory
Friction Mechanism and Characteristics of Reticle Based on Contact Theory
2022
Jianwei Wu
Hui Wang
Chen Tianfeng
Yarui Ma
Cui Jiwen
Jiubin Tan
Keywords:
Materials science
Stiction
Deformation (engineering)
Mechanical engineering
Stress (mechanics)
contact theory
Reticle
Mechanism (engineering)
Surface roughness
Correction
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