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YAG Laser Annealing Used to Produce Poly‐Si Films
YAG Laser Annealing Used to Produce Poly‐Si Films
1992
Xinhua Geng
C. Wu
Z. Yu
G Wang
Zuyao Chen
Zhonglin Sun
Wenyuan Xu
Keywords:
Annealing (metallurgy)
Scanning electron microscope
Raman spectroscopy
Thin film
Physics
Laser
Doping
Analytical chemistry
Silicon
Electrical resistivity and conductivity
Condensed matter physics
Optoelectronics
X-ray crystallography
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