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Optimization of (Al,Ti)N thin film formation process by ion beam assisted deposition
Optimization of (Al,Ti)N thin film formation process by ion beam assisted deposition
2000
Yasuo Takahashi
Shuguang Li
Tomoyuki Imakita
Akihiro Imatani
Katsunori Inoue
takahasi yasuo
imakita tomoyuki
imatani akihiro
inoue kati takasi
Keywords:
Ion beam-assisted deposition
Optoelectronics
Surface roughness
Thin film
Materials science
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