A comprehensive look at a new metrology technique to support the needs of lithography performance in near future
2008
Need for accuracy, precision, speed and sophistication in metrology has increased tremendously over the past few
years. Lithography performance will increasingly depend on post patterning metrology and this dependency will
be heavily accelerated by technology shrinkage. These requirements will soon become so stringent that the
current metrology capabilities may not be sufficient to support these near future needs. Accuracy and precision
requirements approaching well into sub-nanometer range while the demand for increase in sampling also
continues, triggering the need for a new technology in this area.
In this technical presentation the authors would like to evaluate such technology that has the potential to support
the future needs. Extensive data collection and tests are ongoing for both CD and overlay. Data on first order
diffraction based overlay shows unprecedented measurement precision. The levels of precision are so low that for
evaluation special methods has been developed and tested. In this paper overlay measurement method and data
will be discussed, as well as applicability for future nodes and novel lithography techniques. CD data will be
reported in the future technical publications.
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