Generating Multimode Entangled Microwaves with a Superconducting Parametric Cavity

We demonstrate the generation of multimode entangled states of propagating microwaves. The entangled states are generated by our parametrically pumping a multimode superconducting cavity. By combining different pump frequencies, applied simultaneously to the device, we can produce different entanglement structures in a programable fashion. The Gaussian output states are fully characterized by our measuring the full covariance matrices of the modes. The covariance matrices are absolutely calibrated by our using an in situ microwave calibration source, a shot-noise tunnel junction. Applying a variety of entanglement measures, we demonstrate both full inseparability and genuine tripartite entanglement of the states. Our method is easily extensible to more modes.