TFT manufacturing method and TFTs, array base panel and display device

The invention discloses a TFT manufacturing method and TFTs, an array base panel and a display device, relates to the technical field of display and aims at improving the electrical conductivity of electrodes in each TFT. The TFT manufacturing method comprises the steps of forming a figure of a grid electrode on a substrate base panel; forming a grid electrode insulating layer on the substrate base panel; forming figures of a source electrode and a drain electrode, wherein the source electrode and the drain electrode are located on the grid electrode insulating layer; the manufacturing method further comprises the step of forming metal anti-oxidation protective layers on the surfaces of the grid electrode, the source electrode and/or the drain electrode respectively. According to the TFT manufacturing method, the metal anti-oxidation protective layers are formed on the surfaces of the grid electrode, the source electrode and/or the drain electrode respectively, therefore, oxidation caused to the grid electrode, the source electrode and/or the drain electrode in subsequent processes can be avoided, so that the electrical conductivity of the electrodes in each TFT can be improved. The method is used for displayer manufacturing.