Interdigitated Electrodes and Microcantilever Devices for Sensitive Gas Sensor Using Tungsten Trioxide

Microdevices such as interdigitated electrodes (IDEs) and piezoresistive-based microcantilevers are the most prominent gas sensor devices to miniaturize the sensing device and enhance the sensing properties. This paper presents the design and development of these microdevices for gas sensing applications. Tungsten trioxide (WO3) is one of the well-studied materials from n-type semiconducting metal oxides which has already been used for gas sensing. A combination of a sensitive microdevice with high sensing property of WO3 can be used for low-level gas detection. COMSOL Multiphysics software is used to determine optimal design conditions to get the highest sensitivity from the microdevices. IDEs and microcantilever are fabricated using optimized dimensions. SEM and HRXRD of deposited WO3 film have been acquired.