Research on the Laser Crystal Growth Furnace's Up-weighing Method ADC Technique

Automatic diameter control(ADC) is a key technique for the CZ crystal growth equipment.In this paper,a kind of up-weighing ADC method for the laser crystal growth furnace is presented and its principle is analyzed in theory.And this system developed independently on the traditional TDL-J50A and TDL-J60 laser crystal growth furnace is mainly introduced as well as its mechanical structure and control system.Using this ADC system,51～76mm YAG crystal and 51～76mm LiNbO3 crystal have been successfully grown,and have acquired a good effect.