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Growth of AlGaN films on annealed MOVPE-grown AlN templates
Growth of AlGaN films on annealed MOVPE-grown AlN templates
2019
Shigeyuki Kuboya
Yuta Tezen
Kenjiro Uesugi
Kenji Norimatsu
Kanako Shojiki
Hideto Miyake
Keywords:
Annealing (metallurgy)
Metalorganic vapour phase epitaxy
Optoelectronics
Materials science
nitride semiconductors
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