Characterization of integrated thin film Pt heater and temperature sensors on Si platform

In this paper the design, fabrication methods and characterization of thin film meandered Pt resistive heater (size20×20mm 2 ) with integrated Pt sensors on Si platform is presented. Pt heaters and temperature sensors were fabricated simultaneously by DC sputtering method. It was found that the fabrication process has significant influence on the electrical properties of the realized thin film resistive layers, which also explains the discrepancies between the calculated and measured values that were obtained during this work. Annealing temperature of the Pt layers was found to influence significantly the final resistance of the deposited layer and was performed at 500 °C. To reduce the heat loss, the heater and temperature sensors were covered by Pyrex glass with prefabricated cavity. By this new approach, the power consumption was reduced due to improved thermal insulation. A comparative study was performed and showed that we can decrease the power consumption by more than 25% only by this approach. Measured temperature coefficient of resistance (TCR) for temperature sensors and the heater was between 1400−1700 ppm and showed that also the heater can be used as temperature sensing element.