Monitoring the loss of mass or the volume recessed into a waveguide by resonant signal principle: Nano-inscribed slots in DUV210 micro-resonators

The goal of this paper is to study the impact of a differential mass loss or a lack of material (void) directly located into the core structure of matter together with the possibility of measuring its effect by a resonant signal surface at optical frequencies. To this end, the focus has been on the evolution of effective indices or eigenvalues of micro-resonators as relevant models. Specific lack of mass was measured by way of a resonant optical signal principle. Then, specific families of resonators have been designed and shaped with several slits nano-inscribed upon them. The signal resonant light is then characterized by its pseudo-period while considering the whole geometry, taking account of the void; thus, it contains the information regarding the pre-defined recessed volume. The study was carried out first by controlling the deep UV technology onto an organic so as to fabricate the family of slotted micro-resonators before assessing the evolution of the effective index of the system that is inversely proportional to the free spectral range. Experimentally, the design of the measurement platform made it possible to measure the impact of a given lack of material within the cyclic resonators. Experimental measurements have been carried out so as to confirm previous simulations demonstrating a convergence ranging from 0.09 to 0.39%. Accordingly, the relevant results allow us to validate a quantified description regarding the hollowed out volume (or mass recessed within the core waveguide) with regard to the spatial resonant optical signal. Key words: Deep UV210 polymer, nano-inscribed slots, micro-resonators, optical resonance monitoring, lack of material, void characterizations.