The FOM‐MEQALAC experiment

The FOM‐MEQALAC (Multiple Electrostatic Quadrupole Array Linear Accelerator) system in which four He+ ion beams of 2.2 mA are accelerated from 40 to 120 keV is discussed. Some fundamental considerations concerning the design of MEQALAC systems are presented. We report measurements of currents, emittances and energies of injected 10 mA beams, performed behind the ion source, matching section, Low Energy Beam Transport (LEBT) section and the accelerator. Furthermore, parameters for plasma diagnostics and ion implantation accelerators are given.