Fast Feedback Control Method in RF Plasma Discharge Experiments

In many plasma discharge applications, automatic control of discharge mode is very important to maintain the best effect of generated plasma on flows or processed materials. A fast feedback control method in RF plasma discharge system is proposed to keep plasma actuator in desired plasma mode, which includes RF amplifier, impedance matching circuit, plasma actuator, oscilloscope, and controlling computer. The experiment installation and feedback control scheme are presented in detail, and experiment results show that the proposed fast feedback control method in RF plasma discharge system is valid and reliable.