Surface micromachined MEMS-tunable PIN-photodiodes around 1550-nm

Julijan Cesar,Sujoy Paul,Mohammad Tanvir Haidar,Brian Corbett,Arkadi Chipouline,Franko Küppers

Surface micromachined MEMS-tunable PIN-photodiodes around 1550-nm

2017

Julijan Cesar
Sujoy Paul
Mohammad Tanvir Haidar
Brian Corbett
Arkadi Chipouline
Franko Küppers

We report continuously widely tunable InP-based pin-photodiodes by integrating a surface micromachined MEMS-based Fabry-Perot filter with FWHM/FSR of 0.3 nm/189 nm. Detection of 36 nm is obtained for WDM- or sensing-applications around 1550 nm.

Keywords:

Optics
Photodiode
Physics
Optoelectronics
Wavelength-division multiplexing
Microelectromechanical systems
Full width at half maximum

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