Integrated waveguide interferometer with picometric performances

We present an integrated optical waveguide interferometer highly compact and easy-to-use. Metrological study is focused on the resolution and the noise level of the sensor. A standard Allan deviation lower than 50 pm has been observed in standard environment. Power spectral densities up to 150 fm.Hz-1/2 at 10 kHz are achieved. The flicker level is not reached because of the environmental conditions but the high frequency noise is likely to be lower than 100 fm. Hz-1/2. We present measures for steps of 0.5 nm at a sample frequency of 1 kHz. Although we use it as sensing motions measurement over micrometric range, the maximum displacement range is 5 centimeters depending on the output lens which is used.