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Medium-frequency Microwave Plasma Immersion Ion Implantation
Medium-frequency Microwave Plasma Immersion Ion Implantation
2001
Honghui Tong
Zejii Xu
Qinchuan Chen
Ke Wang
Yanfeng Huo
Di Ma
Paul K. Chu
Keywords:
Medium frequency
Materials science
Ion source
Optoelectronics
Ion implantation
Immersion (virtual reality)
Correction
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