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A Rotating Ring Disk Study of Accelerators with Cl - and Br - for Copper Damascene Electrodeposition
A Rotating Ring Disk Study of Accelerators with Cl - and Br - for Copper Damascene Electrodeposition
2018
Anh Van Nhat Tran
Ha Van Hoang
Tetsuji Hirato
Kazuo Kondo
Keywords:
Metallurgy
Copper
Copper interconnect
Materials science
copper damascene
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