A rotational MEMS diffraction grating for realization of micro-sized spectroscope system

In this paper, a novel rotational MEMS diffraction grating for realization of micro-sized spectroscope system with SiOB (Silicon Optical Bench) technology is newly developed, and its evaluation results are reported for the first time. Since this device has “out-of-plane” optical surface on the rotational actuator, concept of micro optical bench is applicable to realize precision alignment in the micro spectrometer. A diffraction grating was fabricated by silicon, and it is mounted on the stage of an electrostatic rotational actuator. Driving the stage by ±3.5° at DC80V, wavelength of white light was successfully modulated in the range from 515nm to 763nm at an 11% diffraction efficiency.