Evaluating of Diamond Like Carbon Using Deep UV Raman Spectroscopy

Deep UV Raman spectroscopy is expected as a technique to evaluate diamond like carbon (DLC) because it observes sp3 bonds peak, called T-peak, and sp2 bonds, called G-peak, directly. To use the advantage of deep UV Raman spectroscopy, we show the evaluation of sp2 bonds rich DLC, called a-C:H, and several type of sp3 bond rich, called ta-C. The a-C:H samples are thermal treatment sample which are evaluated by visible Raman on empirical rule. These were evaluated by Deep UV Raman. It is considered that Deep UV Raman spectroscopy is versatile technique for evaluating diamond like carbon.