Next Generation System in a Package Manufacturing by Embedded Chip Technologies

The embedding of active and passive components offers a wide range of benefits and potentials. With the use of laminate based technology concepts, components can be moved from surface mount into the build-up layers of substrates by embedding and by that, the third dimension will be available for further layers or assemblies. This paper will briefly discuss the necessary process steps of the embedded chip technology and more importantly it will focus on new efforts to actually use chip embedding concepts for the realization of standard-type industrial Quad Flat Packages with embedded chips (embedded chip QFN). Chips of 50 μm thickness, a pad pitch of 100 μm and pad size of 85 μm are die bonded to a copper substrate and subsequently embedded in RCC (Resin-Coated-Copper) layers by using vacuum lamination. The resulting QFN packages are only 160 μm thick and provide standard pads at 400 μm pitch and a total number of 84 I/Os with dimensions of 10x10 mm2. All embedded chip QFN packages at prototype level are m...